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Lab Six Source vacuum evaporation coater for Depositing Perovskite Solar Cell FilmsLab Six Source vacuum evaporation coater for Depositing Perovskite Solar Cell FilmsLab Six Source vacuum evaporation coater for Depositing Perovskite Solar Cell FilmsLab Six Source vacuum evaporation coater for Depositing Perovskite Solar Cell FilmsLab Six Source vacuum evaporation coater for Depositing Perovskite Solar Cell Films

Lab Six Source vacuum evaporation coater for Depositing Perovskite Solar Cell Films

    The 6-source evaporation coater integrates six independent evaporation sources, allowing users to simultaneously or sequentially deposit up to six different materials on the same equipment

The 6-source evaporation coater integrates six independent evaporation sources, allowing users to simultaneously or sequentially deposit up to six different materials on the same equipment. This versatility makes the device particularly suitable for research and development of new thin film materials, especially in fields that require precise control over film composition and structure.

Product Overview:

Multi-source Evaporation: The device is equipped with six evaporation sources that can be controlled independently, allowing for the construction of complex thin film structures.

Precision Control: Each evaporation source can be individually adjusted to achieve precise material deposition and thin film thickness control.

Environmental Control: Often used in conjunction with a glove box system to ensure that coating is carried out in a water-free, oxygen-free, and dust-free environment, which is especially important for sensitive materials.

Product Features:

Multi-source Evaporation: Equipped with 6 evaporation sources, capable of evaporating up to 6 different organic materials, or co-evaporating 2 materials simultaneously.

High-Precision Film Thickness Control: Uses a high-precision thickness meter to achieve precise control of the evaporation rate and final thickness.

Environment Control: Works in conjunction with the glove box system to ensure film deposition in an inert atmosphere, preventing material oxidation and moisture contamination.

Easy Operation: The equipment is designed with ease of operation in mind, such as the front sliding door structure, facilitating user operation within the glove box.

Safety Protection: Multiple safety protection features are combined to greatly increase the safety factor.

Purchase Information:

If you are interested in our Lab Six Source vacuum evaporation coater system, please contact us for more information and a quote.

Phone: 183-3926-3857
Email: jack@cysitech.com
Contact Person: Jack Yang
WeChat: 183 3926 3857

Detailed parameter:

1.Vacuum   Chamber

Appearance

1   set of high-quality 304   stainless steel D-shaped vacuum chamber, the internal   size of the   vacuum chamber is D400*480mm, the front and rear double doors,   and the   rear door adopts a hinged square door, which is convenient for     cleaning the vacuum chamber, internal debugging, maintenance and     pick-and-place samples;

The   front door adopts horizontal   pull square door, and each front

and rear door   is equipped with 1 set   of DN100 windows;

Model

CY-EVH400-VI-HHH-SS

Bottom

2   sets of metal source interfaces,   4 sets of organic source interfaces, 1 set   of molecular pump   interface, 2 sets of lighting interfaces and 3 sets of film   thickness   probe interfaces;

Top

1   set of sample stage interface, 1   set of electric baffle interface, 1 set of   high vacuum pneumatic   baffle valve interface;

Left   side

1   set of high vacuum pneumatic   flapper valve interface.

2.Metal/Organic   Source System

Metal   source

Quantity:   2 sets

2   sets of water-cooled copper   electrodes, compatible with evaporation boats   (tungsten, molybdenum   and tantalum boats) and spiral wires, equipped with   pneumatic baffles,   1 set of 1KW DC constant current power supply (digital   display),   current adjustment accuracy 1A (fine adjustment), the power meets     common Evaporation of metals and metal oxides;

Organic   source

Quantity:   4 sets

4CC   quartz boat, 2 temperature   control power supplies (temperature control meter   display accuracy   0.1°C), temperature range: RT~500°C (temperature control   accuracy   ±1°C), with pneumatic baffle;

Baffle

The   evaporation source is   independent from each other, and the baffle is   separated to avoid   cross contamination

3.Sample   Stage System

Substrate   rotation

The   speed is continuously   adjustable from 0 ~ 30 rpm;

Substrate   lifting

Electric   lifting, the distance   between the substrate and the evaporation source is 200~300mm     continuously adjustable through the touch screen;

Sample   holder

20*20mm   substrate 8 pieces

Substrate   shutter

Electric   shutter

4.Vacuum   System

Vacuum   pump set

1)   1 set of 600L/s molecular pump;

2)   1 set of 8L/s rotary vane pump

3)   1 set of CF150 high vacuum   pneumatic gate valve;

4)   1 set of CF40 high vacuum   pneumatic flapper valve;

5)   2 sets of KF16 high vacuum   pneumatic flapper valves;

6)   1 set of KF40 high vacuum   pneumatic flapper valve;

7)   1 set of KF40 vacuum solenoid   valve;

8)   2 sets of KF40 pump valve   connecting hoses, 1 set of KF40 tee;

9)   1 set of digital vacuum gauge   (measurement range: 1×1051×10-5Pa)

5.Film   Thickness Monitor System

Film   thickness meter

1   set of three-channel quartz   crystal film thickness monitor

Film   thickness probe

3   sets of CF35 water-cooled film thickness   probe

6.Equipment   Rack

1)   1 set of 40 carbon steel square   tube welding frame;

2)   4 pieces of universal wheels,   move and adjust;

3)   4 pieces of M16 feet, locked   and positioned.

7.Electronic   Control System

Power   supply of metal source

1   set

Power   supply of organic source

2   sets (one for two)

Evaporation   source baffle power   supply

1   set

Three-channel   quartz crystal film   thickness monitor

1   set

Sample   table and its baffle power   supply

1   set

Baking   lighting power supply

1   set

PLC   control

1   set, equipped with touch screen

Total   control power supply

1   set

 Main parts:

Name

Description

Host

Multi source evaporation coater

Vacuum pump system

Turbo vacuum pump set            

Water chiller

1 set

Test target

Usually metallic copper, Ag pellets, etc

Random accessories

Auxiliary accessories (tubes, wires,   wrenches, etc.)

  Application: 

The 6-source evaporation coater is widely applied in various fields, including:

Research and Development of Perovskite Solar Cells: The 6-source evaporation coater is used for depositing various organic materials such as Cu, Ag, C60, NPB, TPBi, which are crucial in the fabrication of perovskite solar cells.

Academic and Scientific Research: It is extensively used in universities and research institutes for teaching, scientific research experiments, and exploratory experiments for new product development.

Semiconductor Industry: The coater is suitable for semiconductor device manufacturing, where precise control over the deposition of various materials is required.

Optical Thin Film Components: It is used for the deposition of thin films in optical components, which can improve the transmission, reflection, and absorption properties of optical elements.

Nano and Microelectronics: The equipment is utilized in the development of nano and microelectronic devices, where thin film deposition is a critical step.

New Material Research: The 6-source evaporation coater is employed in the research and development of new materials that require precise thin film deposition processes.

These applications highlight the versatility and importance of the 6-source evaporation coater in material science and nanotechnology.

  Application Case (6-Source Evaporation Coating System for Depositing Perovskite Solar Cell Films )

The process of depositing perovskite solar cell films using a 6-source evaporation coater can be outlined as follows:

Preparation: Begin by loading the substrate into the glove box to ensure an oxygen- and moisture-free environment.

Evaporation Sources Loading: Load the source materials to be deposited (evaporants) into the respective crucibles or boats of the evaporation sources.

Heating and Evaporation: Heat the sources to high temperatures, causing the source material to evaporate. The evaporant vapor is then transported to and impinges on the substrate surface.

Condensation and Film Formation: The evaporant condenses on and is adsorbed by the substrate surface, forming a thin film.

Coating Uniformity: Ensure that the evaporation process results in a uniform coating across the substrate. This can be achieved by adjusting the distance between the source and the substrate, as well as the angle of deposition.

Sequential Deposition: Utilize the multiple evaporation sources to deposit different layers sequentially, which is particularly useful for complex perovskite structures.

Monitoring and Control: Use a film thickness monitoring system to control the deposition rate and ensure the desired film thickness is achieved.

Cooling and Removal: After the deposition is complete, allow the substrate to cool down before removing it from the glove box for further processing or analysis.

Post-Deposition Treatment: Depending on the specific perovskite material and the desired properties of the solar cell, post-deposition treatments such as annealing may be necessary to improve the crystallinity and stability of the perovskite film.

This process allows for the precise control over the deposition of perovskite films, which is crucial for the performance of perovskite solar cells. The use of a 6-source evaporation coater enables the deposition of multiple materials in a single run, streamlining the production of complex perovskite structures.

 


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  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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