E-mail: cysi@cysi.wang
The 6-source evaporation coater integrates six independent evaporation sources, allowing users to simultaneously or sequentially deposit up to six different materials on the same equipment
The 6-source evaporation coater integrates six independent evaporation sources, allowing users to simultaneously or sequentially deposit up to six different materials on the same equipment. This versatility makes the device particularly suitable for research and development of new thin film materials, especially in fields that require precise control over film composition and structure.
Multi-source Evaporation: The device is equipped with six evaporation sources that can be controlled independently, allowing for the construction of complex thin film structures.
Precision Control: Each evaporation source can be individually adjusted to achieve precise material deposition and thin film thickness control.
Environmental Control: Often used in conjunction with a glove box system to ensure that coating is carried out in a water-free, oxygen-free, and dust-free environment, which is especially important for sensitive materials.
Multi-source Evaporation: Equipped with 6 evaporation sources, capable of evaporating up to 6 different organic materials, or co-evaporating 2 materials simultaneously.
High-Precision Film Thickness Control: Uses a high-precision thickness meter to achieve precise control of the evaporation rate and final thickness.
Environment Control: Works in conjunction with the glove box system to ensure film deposition in an inert atmosphere, preventing material oxidation and moisture contamination.
Easy Operation: The equipment is designed with ease of operation in mind, such as the front sliding door structure, facilitating user operation within the glove box.
Safety Protection: Multiple safety protection features are combined to greatly increase the safety factor.
If you are interested in our Lab Six Source vacuum evaporation coater system, please contact us for more information and a quote.
Phone: 183-3926-3857
Email: jack@cysitech.com
Contact Person: Jack Yang
WeChat: 183 3926 3857
1.Vacuum Chamber | |
Appearance | 1 set of high-quality 304 stainless steel D-shaped vacuum chamber, the internal size of the vacuum chamber is D400*480mm, the front and rear double doors, and the rear door adopts a hinged square door, which is convenient for cleaning the vacuum chamber, internal debugging, maintenance and pick-and-place samples; The front door adopts horizontal pull square door, and each front and rear door is equipped with 1 set of DN100 windows; |
Model | CY-EVH400-VI-HHH-SS |
Bottom | 2 sets of metal source interfaces, 4 sets of organic source interfaces, 1 set of molecular pump interface, 2 sets of lighting interfaces and 3 sets of film thickness probe interfaces; |
Top | 1 set of sample stage interface, 1 set of electric baffle interface, 1 set of high vacuum pneumatic baffle valve interface; |
Left side | 1 set of high vacuum pneumatic flapper valve interface. |
2.Metal/Organic Source System | |
Metal source | Quantity: 2 sets 2 sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum and tantalum boats) and spiral wires, equipped with pneumatic baffles, 1 set of 1KW DC constant current power supply (digital display), current adjustment accuracy 1A (fine adjustment), the power meets common Evaporation of metals and metal oxides; |
Organic source | Quantity: 4 sets 4CC quartz boat, 2 temperature control power supplies (temperature control meter display accuracy 0.1°C), temperature range: RT~500°C (temperature control accuracy ±1°C), with pneumatic baffle; |
Baffle | The evaporation source is independent from each other, and the baffle is separated to avoid cross contamination |
3.Sample Stage System | |
Substrate rotation | The speed is continuously adjustable from 0 ~ 30 rpm; |
Substrate lifting | Electric lifting, the distance between the substrate and the evaporation source is 200~300mm continuously adjustable through the touch screen; |
Sample holder | 20*20mm substrate 8 pieces |
Substrate shutter | Electric shutter |
4.Vacuum System | |
Vacuum pump set | 1) 1 set of 600L/s molecular pump; 2) 1 set of 8L/s rotary vane pump 3) 1 set of CF150 high vacuum pneumatic gate valve; 4) 1 set of CF40 high vacuum pneumatic flapper valve; 5) 2 sets of KF16 high vacuum pneumatic flapper valves; 6) 1 set of KF40 high vacuum pneumatic flapper valve; 7) 1 set of KF40 vacuum solenoid valve; 8) 2 sets of KF40 pump valve connecting hoses, 1 set of KF40 tee; 9) 1 set of digital vacuum gauge (measurement range: 1×105～1×10-5Pa) |
5.Film Thickness Monitor System | |
Film thickness meter | 1 set of three-channel quartz crystal film thickness monitor |
Film thickness probe | 3 sets of CF35 water-cooled film thickness probe |
6.Equipment Rack | |
1) 1 set of 40 carbon steel square tube welding frame; 2) 4 pieces of universal wheels, move and adjust; 3) 4 pieces of M16 feet, locked and positioned. | |
7.Electronic Control System | |
Power supply of metal source | 1 set |
Power supply of organic source | 2 sets (one for two) |
Evaporation source baffle power supply | 1 set |
Three-channel quartz crystal film thickness monitor | 1 set |
Sample table and its baffle power supply | 1 set |
Baking lighting power supply | 1 set |
PLC control | 1 set, equipped with touch screen |
Total control power supply | 1 set |
Name | Description |
Host | Multi source evaporation coater |
Vacuum pump system | Turbo vacuum pump set |
Water chiller | 1 set |
Test target | Usually metallic copper, Ag pellets, etc |
Random accessories | Auxiliary accessories (tubes, wires, wrenches, etc.) |
The 6-source evaporation coater is widely applied in various fields, including:
Research and Development of Perovskite Solar Cells: The 6-source evaporation coater is used for depositing various organic materials such as Cu, Ag, C60, NPB, TPBi, which are crucial in the fabrication of perovskite solar cells.
Academic and Scientific Research: It is extensively used in universities and research institutes for teaching, scientific research experiments, and exploratory experiments for new product development.
Semiconductor Industry: The coater is suitable for semiconductor device manufacturing, where precise control over the deposition of various materials is required.
Optical Thin Film Components: It is used for the deposition of thin films in optical components, which can improve the transmission, reflection, and absorption properties of optical elements.
Nano and Microelectronics: The equipment is utilized in the development of nano and microelectronic devices, where thin film deposition is a critical step.
New Material Research: The 6-source evaporation coater is employed in the research and development of new materials that require precise thin film deposition processes.
These applications highlight the versatility and importance of the 6-source evaporation coater in material science and nanotechnology.
Application Case (6-Source Evaporation Coating System for Depositing Perovskite Solar Cell Films )：
The process of depositing perovskite solar cell films using a 6-source evaporation coater can be outlined as follows:
Preparation: Begin by loading the substrate into the glove box to ensure an oxygen- and moisture-free environment.
Evaporation Sources Loading: Load the source materials to be deposited (evaporants) into the respective crucibles or boats of the evaporation sources.
Heating and Evaporation: Heat the sources to high temperatures, causing the source material to evaporate. The evaporant vapor is then transported to and impinges on the substrate surface.
Condensation and Film Formation: The evaporant condenses on and is adsorbed by the substrate surface, forming a thin film.
Coating Uniformity: Ensure that the evaporation process results in a uniform coating across the substrate. This can be achieved by adjusting the distance between the source and the substrate, as well as the angle of deposition.
Sequential Deposition: Utilize the multiple evaporation sources to deposit different layers sequentially, which is particularly useful for complex perovskite structures.
Monitoring and Control: Use a film thickness monitoring system to control the deposition rate and ensure the desired film thickness is achieved.
Cooling and Removal: After the deposition is complete, allow the substrate to cool down before removing it from the glove box for further processing or analysis.
Post-Deposition Treatment: Depending on the specific perovskite material and the desired properties of the solar cell, post-deposition treatments such as annealing may be necessary to improve the crystallinity and stability of the perovskite film.
This process allows for the precise control over the deposition of perovskite films, which is crucial for the performance of perovskite solar cells. The use of a 6-source evaporation coater enables the deposition of multiple materials in a single run, streamlining the production of complex perovskite structures.
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